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快三平台 快三平台 真空设备有限公司
Shanghai Qunxian Vacuum Equipment Co.,ltd

浮动式涡旋干泵的结构设计与特点

文章附图

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GAISHU

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一、涡旋真空泵的工作原理

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X=α•(cos θ+ θ•sin θ)

Y=α•(sin θ+ θ•cos θ)

  QIZHONGCHANGSHUαDAIBIAOZHOUBANJING,θDAIBIAOZHANKAIJIAO。

涡旋压缩技术工作原理

TU1 WOXUANYASUOJISHUGONGZUOYUANLI

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二、传统涡旋干泵的结构设计与特点

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径向间隙的切向泄漏

TU2 JINGXIANGJIANXIDEQIEXIANGXIELOU

轴向间隙的径向泄漏

TU3 ZHOUXIANGJIANXIDEJINGXIANGXIELOU

  在传统涡旋干泵的结构设计中,径向泄漏通过顶密封的方式来解决,而切向泄漏则采用控制动涡旋盘与静涡旋盘壁之间间隙的方法来解决。当今市场上,主要典型厂家的主要产品系列中,顶密封采用在动定涡旋盘副的顶端铣一个密封槽,然后将PTFE材质的密封条沿型线中心点向外轻轻压入密封槽,整个密封条突出密封槽部分必须控制在很小的范围内,才能达到顶密封的较理想的效果。而各气腔的密封是由涡旋体的侧壁之间的缝隙和相对滑动速度的大小决定的,也必须控制在一个很小的范围内。如此一个精密度,对加工设备和装配精度都提出了非常高的要求。目前各厂商为了保证产品的精密度,在整个装配过程中,必须采用零件选配并使用特殊工装进行定位装配,以保证涡旋盘部分的精度要求。但是由于所能达到的精度限制,传统涡旋干泵的抽气速率只能在3.6m3/hr至60m3/hr之间,其也主要集中在1Pa至10Pa,只有Edwards的nXDS系列中,有两款产品的极限真空度据称能达到0.7Pa。但是Edwards的涡旋干泵采用了密封,在产品寿命和可靠性上尚存在着较大的问题,其市场接受度仍然非常有限。

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  ZAIZHANGSHIJIANYUNZHUANGONGZUOGUOCHENGZHONG,DINGDUANMIFENGTIAOHUIBUDUANDICHANSHENGJIAODASHULIANGDEFENXIE,GAIFENXIEBUJINHUIDUIZHOUBIANHUANJINGCHANSHENGXINDEWURAN,TONGSHIGUOLIANGDEFENXIEHUIJIJIEZAIBENGDEYASUOQIANGZHONG,ZAIBENGFEIZHENGCHANGTINGCHEDEQINGKUANGXIA,JIANGZHEIXIEFENXIEJIANGHUIZHIJIEHUIPAIZHIZHONG,ZHIJIEWURANZHENKONGXITONG。TONGSHIYOUYUBUDUANMOSUN,JINGXIANGDEXIELOUHUIBUDUANZENGJIA,ZAIYUNXINGYIDUANSHIJIANHOU,BENGDECHOUQISULVHEJIXIANZHENKONGDUDOUHUISHOUDAOJIAODACHENGDUYINGXIANG,TONGSHIYOUYUMOSUN,BENGXUYAODINGQIWEIHU,DINGQIGENGHUANMIFENGTIAO,RUCIYILAI,BUJINJIANGDIBENGDEXINGNENG,TONGSHIHAIDADAZENGJIAQISHIYONGCHENGBEN。DANGQITIXIELOUZHUJIANBIANDA,QITIDEZHONGFUYASUOYANZHONG,ZHANGQIRUCI,JIANGZHIJIEDAOZHIBENGDEKEKAOXINGMINGXIANJIANGDI,SHIYONGSHOUMINGDADAZHEKOU。

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三、浮动式涡旋干泵的结构设计与特点

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浮动式涡旋干泵动涡卷图

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  基于浮动式涡旋压缩技术,思科涡旋科技(杭州)有限公司现有系列化的真空泵产品其中微型真空泵抽速为0.1 m3/hr ,0.3m3/hr、1.2m3/hr和3m3/hr。最高极限真空度分别为30Pa至0.5 Pa;目前已成功应用于质谱仪、比表面仪、、清罐仪以及科学研究和手机、芯片等半导体生产工艺过程中。工业级产品两款,抽速为18m3/hr和60m3/hr,最高极限真空度均为0.1Pa,目前正在晶体生长炉、PECVD等设备测试应用。

  RUTU5SUOSHI,SVF-5XINGWEIFUDONGSHIWUYOUWOXUANGANBENG,QIZUIGAOJIXIANZHENKONGDUWEI5Pa,CHICUNWEI182×94×94mm,ZHENGJIZHONGLIANGZHIYOU1.1Kg,FEICHANGSHIHEYONGYUBIANXIESHIKEXUEYIQIZHONG。

(Turbo)泵组,特别是一些专业的科学仪器、检测仪器,基本都采用进口无油隔膜泵和分子泵的泵组。以下我们就用1.8m3/hr的某进口隔膜泵和1.2m3/hr的浮动式涡旋干泵(SVF-E2-20)配TurboLab80分子泵的实际测试数据进行对比说明。

无油隔膜泵和浮动式涡旋干泵抽速曲线图

TU6 WUYOUGEMOBENGHEFUDONGSHIWOXUANGANBENGCHOUSUQUXIANTU

BIAO1 WUYOUGEMOBENGHEFUDONGSHIWOXUANGANBENGCHOUZHENKONGNENGLIDUIBI

无油隔膜泵和浮动式涡旋干泵抽真空能力对比

  从图6中,可清晰看到SVF-E2-20的浮动式涡旋干泵的极限真空度明显高于进口隔膜泵,同一设备采用接头(KF fittings and bellow hose)的极限真空度要高于采用快插接头(plastic tubing and fittings)连接时的极限真空度。从表1中,可见,在接分子泵TurboLab80时,达到2×10-2 Pa(2×10-4 mbar)的时间,隔膜泵组为4分钟,SVF-E2-20快插连接泵组为42秒,KF连接泵组为30秒。在泵组的极限真空度方面,隔膜泵组只能达到10-4 Pa,SVF-E2-20 KF连接泵组能达到10-5 Pa,如果在真空度较高时,分子泵结合加热干燥等去除水蒸汽的方式,SVF-E2-20 KF连接泵组能达到的极限真空度将更高。

  实验表明,在同等前提下,1.2m3/hr的浮动式涡旋干泵与1.8m3/hr的进口隔膜泵相比,其极限真空度至少高出2个数量级,抽速表现上也明显高于后者。

五、市场前景

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AG游戏五分快三环球体育快三赚钱分分快三快三平台