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高真空干泵螺旋级抽气性能的数值计算模型

  微型化和一体化是发展的重要趋势,高真空干泵是具有代表性的一种新型干泵。本文对高真空干泵的重要部件之一的单螺旋转子进行了数值研究,通过对几何模型重要参数的分析,结合了直接模拟蒙特卡罗的程序思想,对单螺旋转子工作过程进行仿真。模拟得到了单螺旋转子几何参数对抽气效率的影响机制,得到影响高真空干泵性能的参数调节机制,为高真空干泵的设计提供了理论依据和指导。

  JINNIANLAI,(JIANCHENGLUOGANBENG) BEISHOUGUANZHU,QIZHUANZICAIYONGLUOXUANSHIKONGJIANQUXIAN,JUYOUXUDUOXIANZHUDEYOUDIAN,RUCHUANSONGJIEZHIPINGWEN、ZAOSHENGDI、YUNXUJIAOGAODEZHUANSU、JIEGOUJINCOU、SHIYONGSHOUMINGZHANGDENG。LUOGANBENGZAIGONGYEHEGUOFANGDENGLINGYUYOUZHESHIFENGUANGFANDEYINGYONG,RUHUAGONGZHIYAO、HANGKONGHANGTIAN、SHIYOUHUAGONG、BANDAOTIZHUANGBEI、TEQIHUISHOU、TONGYONGGONGYEDENG。DANLUOGANBENGSHILUOGANBENGDEYIZHONG,CAIYONGGAOSUZHUANDONGDEZHUANZIBIAOMIANXIEDAIQITIFENZI,SHIQITILIANXUDIBEICHOUCHUBENGTI,JUYOURAODONGJIXIAO、PINGWENCHUANSHUDETEDIAN。

  QINGJIEHUA、WEIXINGHUAHEJIANDANHUASHIZHENKONGHUODESHEBEIJIXITONGFAZHANDEZHONGYAOQUSHI,QIZHONGZUIJUDAIBIAOXINGDESHIGAOZHENKONGFANWEINEIZHIPAIDAQIDEGANSHIZHENKONGHUODEJISHU。GAOZHENKONGGANBENGCAIYONGDUOZHONGGAOSUXUANZHUANDEDANZHOUBENGFUHEERCHENG,KAOJINXIQICECAIYONGDANLUOXUANZHUANZILAIWANCHENGDAPAILIANGDEXIQICHUANSHUGUOCHENG。ZAIQITICHUANSHUGUOCHENGZHONG,LUOXUANJIZHUANZIDEYEPIANXINGZHUANG、SHULIANG、CHICUN、QINGJIAODENGJIEGOUSHEJICANSHUDEXUANQU,JIANGDUIQICHOUQIXINGNENGCUNZAIJIAODADEYINGXIANG。

  ZHIJIEMONIMENGTEKALUO(DSMC)FANGFADEJICHUSHIZHUIZONGMONIFENZIDEYUNDONGGUIJI,ZHEIGEGUOCHENGYAOCONGJIDINGDECHUSHIZHUANGTAICHUFA,CHUSHIZHUANGTAIZAIHONGGUANLIUDONGWEIDINGCHANGLIUDONGTIAOJIANXIADEXUANQUSHIRENYIDE,ZAIZHUIZONGGUOCHENGZHONG,MONIFENZIZAIBUTONGZHUANGTAIXIADECANSHUDEYIJILU,ZAITONGGUOJINYIBUDETONGJIPINGJUN,JIUKEYIHUODEQITIHONGGUANZHUANGTAIDECANSHU。LUOXUANJIZAIGONGZUOGUOCHENGZHONGZHUYAOCHUYUFENZILIUQUYU,JIYUBird DENGGAIJINDEDSMCFANGFA,KEYIJIANLIZHUANZIMOXINGZHONGLUOXUANCAOTONGDAONEIQITILIUCHANGDESHUZHIMONIFANGFA。

  BENWENGENJUDANLUOXUANZHUANZIDETEDIAN,JIANLILEDANLUOXUANZHUANZIDEJIHEMOXING,BINGCAIYONGDSMCFANGFAFENXIQICHOUQIGUOCHENG,MONIFENZILIUTAIXIAQITIFENZIZAIBENGNEIDEYUNDONGQINGKUANG,TONGGUOMONIJIEGUO,DUIQITIFENZIYUNDONGGUOCHENGJINXINGZAIXIAN,BINGDUIJISUANJIEGUOJINXINGFENXI,DEDAODEXINGNENGCANSHUDEDUIBI。TONGGUOYIDSMCFANGFAWEIJICHUDESANWEIMONI,HUODELUOXUANJIZHUANZIDEGEZHONGJIEGOUCANSHUZAICHOUQIGUOCHENGZHONGDEYINGXIANGXIAOGUO,CONGERWEIGAOZHENKONGGANBENGDEJIEGOUYOUHUATIGONGZHICHENG。

  1、LUOXUANJIZHUANZIJIHEMOXING

  DUIYUGAOZHENKONGGANBENG,HUODEGENGDADECHOUSU,BINGZENGJIAYASUOBISHIQIZUIZHUYAODERENWU,ZHEIYAOQIUZAILUOXUANJIZHUANZIDESHEJIGUOCHENGZHONG,JIYAOSHIZHUANZIZAIGAOZHENKONGFANWEINEINENGSHUNLIDECHOUCHUDALIANGQITIFENZI,YOUYAOSHILUOXUANJIZHUANZIWEIDUANDEYALIZUIDAHUA,YIJIANXIAOQIANYINFENZIJICHOUQIFUZAI。WEILEMANZUSHANGSHUYAOQIU,LUOXUANJIZHUANZIWAIBIANYUANCAIYONGYUANZHUMIANLUOXUANXIAN,ERNEIBIANYUANCAIYONGYUANZHUIMIANLUOXUANXIAN,SHIQITIZAICHOUQIFANGXIANGSHANGDEDAOZHUJIANYASUO。GAIMOXINGDEJIANLIDUIHOUXUJIEGOUFENXIHEYOUHUA、LUOXUANJICHOUQIXINGNENGDETISHENGDOUJUYOUGUANJIANDEZUOYONG。ZUIWAIYUANGUIJIXIANRUTU1SUOSHI。

高真空干泵螺旋级抽气性能的数值计算模型

TU1 WAIYUANZHUBIANYUANXINGXIAN

  ZAIGAIMOXINGZHONG,YIPZUOWEIXINGXIANDESHENGCHENGQIDIAN,PMWEIXINGXIANDESHENGCHENGLUJING,GOUJIANLEDANLUOXUANZHUANZIDESANWEIJIEGOU,RUTU2。WEILESHIZHUANZIMOXINGYOULIYUQITIDECHUANSHU,MOXINGSHEJICHENGSIGELUOXUANCAOTONGDAO,YIYUANZHUXINGZUOWEITONGDAOZUIWAIYUANXINGZHUANG,NEIYUANMUXIANYUZHONGZHOUXIANCHENGYIDINGDEJIAJIAO,XINGCHENGZHUIMIANRUTU2(a) 。TU2(b) ZHANSHILUOXUANCAOLIUYU。WANGGEHUAFENYIJUKAIKOUJIAODU、ZHUIMIANQINGJIAOHEZHUANZITIGAODUDENGBIANLIANGLAIJINXING,KESHIZAICHUSHITIAOJIANXIAMEIGEDANYUANNENGGOUBAOLIUDAYUE20GEFENZI。

高真空干泵螺旋级抽气性能的数值计算模型

TU2 DANLUOXUANZHUANZIDE3DMOXING

  TU3(a)BIAOSHIZHUANZIDELUOXUANCAOTONGDAODESHIYITU,CAIYONGBUTONGDENEIYUANBANJINGHELUOXUANSHENGJIAO,YIHUODEBUTONGDEZHUANZIXINGSHI。TU3(b)BIAOSHIYIGEHUAFENHAOWANGGEDECHOUQITONGDAOQUYU,HUAFENYIJUWEIZIDINGYIZUOBIAO。

高真空干泵螺旋级抽气性能的数值计算模型

TU3 ZHUANZIJISUANYU

  2、JIELUN

  DSMC FANGFAZAIGAOZHENKONGGANBENGDEYINGYONGZHONG,KEYIYOUXIAODUILUOXUANJIZHUANZIDEXINGNENGJINXINGMONI,NENGGOUDEDAOYIXIAJIELUN:

  (1) BENGDECHOUQIXISHUZAIZHUANZIHOUDUDEBUDUANZENGJIAZHONGCHENGXIANDEZONGTIQUSHIWEI:YIZHISHANGSHENG,ZHIYIFENGZHIHOUCHUXIANXIAJIANGZHUANGTAI。ZAIKAISHIDEYIDUANFANWEINEI,DIZENGDEZHUANZIHOUDUXINGCHENGLEDIZENGDETONGDAOZHANGDU,YOULIYUJIANRUOFANLIUZUOYONG,DANGZHUANZIHOUDUCHAOGUOYIDINGZHIJIXUZENGJIASHI,GUOZHANGDECHOUQITONGDAONEI,FENZIXINGCHENGGENGWEIPINFANDEPENGZHUANGGUOCHENG,QITIFENZILIUTONGSHOUDAOYINGXIANG,CHOUQIXISHUJIANGDI。

  (2) ZAILUOXUANCAOKAIKOUJIAOZHUJIANZENGDASHI,BENGCHOUQIXISHUDEZHENGTIBIANHUAQUSHIWEI:XIANZENGJIAZHIYIGEFENGZHIHOUJIANXIAO。QITIFENZIDELIUJINGTONGDAOHUISUIZHEKAIKOUJIAODEZENGJIAERZENGDA,GENGDADETONGDAOHUILIUTONGGENGDUODEQITIFENZI,JINERTIGAOCHOUQIXISHU,RANERDANGFENZISHULIANGGUODUOSHI,ZAIYOUXIANDETONGDAOTIJINEIHUICHANSHENGGENGDUODEPENGZHUANG,FENZIDELIUTONGSHOUDAOYINGXIANG,SHICHOUQIXISHUJIANGDI。

  (3) ZAIZHUANSUBUDUANZENGJIAGUOCHENGZHONG,CHOUQIXISHUYIZHISHANGSHENG。QITIFENZIZAITONGDAONEIDEYUNDONGYIKAOZHUANZIZHUANDONGDEXIEDAIZUOYONG,GAOZHUANSUDEZHUANZIZAIGONGZUOGUOCHENGZHONGXINGCHENGGAOSUDEYUNDONGFENZI,ZENGQIANGQITIFENZIDELIUTONG,TIGAOLEBENGDECHOUQIXISHU。

  (4) 在入口压力为10-4 ~10-1Pa 的情况下,本文开发的螺旋级转子数值计算模型与实验结果吻合较好,误差小于6.75%,满足工程设计要求。

















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